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entity go
that which is perceived or known or inferred to have its own distinct existence (living or nonliving)

physical entity go
an entity that has physical existence

matter go
that which has mass and occupies space

substance go
the real physical matter of which a person or thing consists

atom
(physics and chemistry) the smallest component of an element having the chemical properties of the element

noun.substance

5 Subcategories

isotope go
one of two or more atoms with the same atomic number but with different numbers of neutrons
monad go
(chemistry) an atom having a valence of one
carbon atom go
an atom of carbon
hydrogen atom go
an atom of hydrogen
radical, free radical go
an atom or group of atoms with at least one unpaired electron